MCH458 MicrofabricationInstitutional InformationDegree Programs Mechatronics Engineering (English)Information For StudentsDiploma SupplementErasmus Policy StatementNational Qualifications
Mechatronics Engineering (English)

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Bachelor TR-NQF-HE: Level 6 QF-EHEA: First Cycle EQF-LLL: Level 6

Course General Introduction Information

Course Code: MCH458
Course Name: Microfabrication
Course Semester: Fall
Course Credits:
ECTS
6
Language of instruction: EN
Course Requirement:
Does the Course Require Work Experience?: No
Type of course: Departmental Elective
Course Level:
Bachelor TR-NQF-HE:6. Master`s Degree QF-EHEA:First Cycle EQF-LLL:6. Master`s Degree
Mode of Delivery: Face to face
Course Coordinator : Dr.Öğr.Üyesi GÜLTEN SADULLAHOĞLU
Course Lecturer(s):
Course Assistants:

Course Purpose and Content

Course Objectives: The aim of this course is to explain the basic microfabrication technologies used in the production of micro and nanoscale devices.
Course Content: Introduction to microfabrication, Crystal growth techniques, Epitaxy, Doping, Chemical vapor deposition technique, Molecular beam epitaxy, Atomic layer deposition, Thermal oxidation, Wet and dry oxidation, Photolithography, Diffusion, Drive-in process, Etching, Ion implantation, Thin film deposition, metallization

Learning Outcomes

The students who have succeeded in this course;
1) The student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexible/stretchable systems technologies.

Course Flow Plan

Week Subject Related Preparation
1) Introduction to microfabrication: Historical background, clean room, integrated circuits, technology development trend, study of semiconductor materials Related chapter in the reference book

Sources

Course Notes / Textbooks: Kaynak kitap
References: S. Franssila, "Introduction to Microfabrication", Wiley
Gary S. May, Simon M. Sze, "Fundamentals of semiconductor fabrication", Wiley

Course - Learning Outcome Relationship

No Effect 1 Lowest 2 Medium 3 Highest
       
Program Outcomes Level of Contribution
1) Adequate knowledge in mathematics, science and engineering subjects pertaining to the relevant discipline; ability to use theoretical and applied knowledge in these areas in complex engineering problems.
2) Ability to identify, formulate, and solve complex engineering problems; ability to select and apply proper analysis and modelling methods for this purpose.
3) Ability to design a complex system, process, device or product under realistic constraints and conditions, in such a way as to meet the desired result; ability to apply modern design methods for this purpose.
4) Ability to devise, select, and use modern techniques and tools needed for analysing and solving complex problems encountered in engineering practice; ability to employ information technologies effectively.
5) Ability to design and conduct experiments, gather data, analyse and interpret results for investigating complex engineering problems or discipline specific research questions.
6) Ability to work efficiently in intra-disciplinary and multi-disciplinary teams; ability to work individually.
7) Ability to communicate effectively in Turkish, both orally and in writing; knowledge of a minimum of one foreign language; ability to write effective reports and comprehend written reports, prepare design and production reports, make effective presentations, and give and receive clear and intelligible instructions.
8) Recognition of the need for lifelong learning; ability to access information, to follow developments in science and technology, and to continue to educate him/herself.
9) Consciousness to behave according to ethical principles and professional and ethical responsibility; knowledge on standards used in engineering practice.
10) Knowledge about business life practices such as project management, risk management, and change management; awareness in entrepreneurship, innovation; knowledge about sustainable development.
11) Knowledge about the global and social effects of engineering practices on health, environment, and safety, and contemporary issues of the century reflected into the field of engineering; awareness of the legal consequences of engineering solutions

Learning Activity and Teaching Methods

Anlatım
Course
Soru cevap/ Tartışma
Örnek olay çalışması

Measurement and Evaluation Methods and Criteria

Yazılı Sınav (Açık uçlu sorular, çoktan seçmeli, doğru yanlış, eşleştirme, boşluk doldurma, sıralama)
Homework
Sunum

Assessment & Grading

Semester Requirements Number of Activities Level of Contribution
Committee 14 % 0
Attendance 14 % 0
Homework Assignments 2 % 20
Midterms 1 % 40
Final 1 % 40
total % 100
PERCENTAGE OF SEMESTER WORK % 60
PERCENTAGE OF FINAL WORK % 40
total % 100

İş Yükü ve AKTS Kredisi Hesaplaması

Activities Number of Activities Aktiviteye Hazırlık Aktivitede Harçanan Süre Aktivite Gereksinimi İçin Süre Workload
Course Hours 14 3 42
Study Hours Out of Class 14 6 84
Homework Assignments 2 14 28
Midterms 1 14 14
Final 1 12 12
Total Workload 180