MEK458 MicrofabricationInstitutional InformationDegree Programs Mechatronics EngineeringInformation For StudentsDiploma SupplementErasmus Policy StatementNational Qualifications
Mechatronics Engineering

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Bachelor TR-NQF-HE: Level 6 QF-EHEA: First Cycle EQF-LLL: Level 6

Course General Introduction Information

Course Code: MEK458
Course Name: Microfabrication
Course Semester: Fall
Course Credits:
ECTS
6
Language of instruction:
Course Requirement:
Does the Course Require Work Experience?: No
Type of course: Area Ellective
Course Level:
Bachelor TR-NQF-HE:6. Master`s Degree QF-EHEA:First Cycle EQF-LLL:6. Master`s Degree
Mode of Delivery: Face to face
Course Coordinator : Dr.Öğr.Üyesi GÜLTEN SADULLAHOĞLU
Course Lecturer(s):
Course Assistants:

Course Purpose and Content

Course Objectives: The aim of this course is to explain the basic microfabrication technologies used in the production of micro and nanoscale devices.
Course Content: Introduction to microfabrication, Crystal growth techniques, Epitaxy, Doping, Chemical vapor deposition technique, Molecular beam epitaxy, Atomic layer deposition, Thermal oxidation, Wet and dry oxidation, Photolithography, Diffusion, Drive-in process, Etching, Ion implantation, Thin film deposition, metallization

Learning Outcomes

The students who have succeeded in this course;
1) The student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexible/stretchable systems technologies.

Course Flow Plan

Week Subject Related Preparation
1) Introduction to microfabrication: Historical background, clean room, integrated circuits, technology development trend, study of semiconductor materials Related chapter in the reference book

Sources

Course Notes / Textbooks: Kaynak kitap
References: S. Franssila, "Introduction to Microfabrication", Wiley
Gary S. May, Simon M. Sze, "Fundamentals of semiconductor fabrication", Wiley

Course - Learning Outcome Relationship

No Effect 1 Lowest 2 Medium 3 Highest
       
Program Outcomes Level of Contribution
1) Adequate knowledge in mathematics, science and engineering subjects pertaining to the relevant discipline; ability to use theoretical and applied knowledge in these areas in complex engineering problems. 2
2) Ability to identify, formulate, and solve complex engineering problems; ability to select and apply proper analysis and modelling methods for this purpose. 2
3) Ability to design a complex system, process, device or product under realistic constraints and conditions, in such a way as to meet the desired result; ability to apply modern design methods for this purpose. 3
4) Ability to devise, select, and use modern techniques and tools needed for analysing and solving complex problems encountered in engineering practice; ability to employ information technologies effectively. 2
5) Ability to design and conduct experiments, gather data, analyse and interpret results for investigating complex engineering problems or discipline specific research questions. 2
6) Ability to work efficiently in intra-disciplinary and multi-disciplinary teams; ability to work individually. 3
7) Ability to communicate effectively in Turkish, both orally and in writing; knowledge of a minimum of one foreign language; ability to write effective reports and comprehend written reports, prepare design and production reports, make effective presentations, and give and receive clear and intelligible instructions. 3
8) Recognition of the need for lifelong learning; ability to access information, to follow developments in science and technology, and to continue to educate him/herself. 3
9) Consciousness to behave according to ethical principles and professional and ethical responsibility; knowledge on standards used in engineering practice. 2
10) Knowledge about business life practices such as project management, risk management, and change management; awareness in entrepreneurship, innovation; knowledge about sustainable development. 1
11) Knowledge about the global and social effects of engineering practices on health, environment, and safety, and contemporary issues of the century reflected into the field of engineering; awareness of the legal consequences of engineering solutions 3

Learning Activity and Teaching Methods

Anlatım
Course
Soru cevap/ Tartışma
Örnek olay çalışması

Measurement and Evaluation Methods and Criteria

Yazılı Sınav (Açık uçlu sorular, çoktan seçmeli, doğru yanlış, eşleştirme, boşluk doldurma, sıralama)
Homework
Sunum

Assessment & Grading

Semester Requirements Number of Activities Level of Contribution
Committee 14 % 0
Attendance 14 % 0
Homework Assignments 2 % 20
Midterms 1 % 40
Final 1 % 40
total % 100
PERCENTAGE OF SEMESTER WORK % 60
PERCENTAGE OF FINAL WORK % 40
total % 100

İş Yükü ve AKTS Kredisi Hesaplaması

Activities Number of Activities Aktiviteye Hazırlık Aktivitede Harçanan Süre Aktivite Gereksinimi İçin Süre Workload
Course Hours 14 3 42
Study Hours Out of Class 14 6 84
Homework Assignments 2 14 28
Midterms 1 14 14
Final 1 12 12
Total Workload 180